Welcome to Centre of Excellence in Nanoelectronics
CEN - Litho Chemical list
| Chemical |
Chemical Name |
Location/User |
MSDS |
| 1165 Remover |
N-methylpyrolidone |
Nano Litho Lab |
Click |
| AZ 5214E |
2-Methoxyethyl acetate |
Micro1 |
Click |
| HSQ(Hydrogen silesquioxane elctron beam spin on resist) |
Hydrogen silesquioxane |
Nano lab |
Click |
| Organic Polymer Solution(PMMA) |
Organic polymer solution |
Nano lab |
Click |
| Organic Solvent Mixture(MIBK) |
Organic solvent mixture |
Nano lab |
Click |
| Organic Polymer Solution(Anisole - A thinner) |
Organic Polymer Solution |
Nano lab |
Click |
| S1805 |
POLY (AMIDE-IMIDE) POLYMER |
Micro1 |
Click |
| S1813 |
propylene glycol monomethyl ether acetate |
Micro1 |
Click |
| SPR 700-1.0 |
Refer MSDS |
Micro1 |
Click |
| SPR 700-1.2 |
Refer MSDS |
Micro1 |
Click |
| SPR 700-1.8 |
Refer MSDS |
Micro1 |
Click |
| SU-8 2002 |
Organic Resin Solution |
Micro1 |
Click |
| SU-8 2025 |
cyclopentanone |
Micro1 |
Click |
| SU-8 2050 |
Refer MSDS |
Micro1 |
Click |
| SU-8 2100 |
Refer MSDS |
Micro1 |
Click |
| SU-8 Developer(PGMEA) |
propylene glycol monomethyl ether acetate |
Micro1 |
Click |