X-ray LIGA is an ideal tool for fabricating ultra high aspect ratio micro structures. The technique has been used for fabricating optics (x-ray, visible and infrared), sensors and actuators, fluidics and photonics. A beamline for x-ray lithography is operational on Indus-2. The beamline offers wide lithographic window in the x-ray energy range 1-40keV and wide x-ray beam for producing microstructures in polymers of upto ~100mm. The device structure of heights of > 3000?m and aspect ratio of ~100 have been produced in polymers and these polymers structures can be used for making structures in metals and ceramics. Rotating and tilting of the x-ray mask and x-ray resist and their relative movements enables to realise 3D microstructures. High aspect ratio structures fabricated for various applications including x-ray optics, mechanical engineering, sensors/actuators and material science will be presented. X-ray refractive lenses are produced in x-ray sensitive, high radiation and temperature resistance material. These x-ray lens have been deployed in high pressure x-ray diffraction and x-ray imaging beamines at synchrotron radiation sources. The talk will also highlights the results on the development of high aspect ratio comb drives, amplification mechanism, rectangular cavity resonator are produced in PMMA. Various devices under development are biosensors, micro fluidic devices, micro gears, X-ray gratings, x-ray collimators, THz structures. There has been significant progress towards fabricating proto type modules using X-ray LIGA. Results on these developments will also be presented.
M.Sc. Physics Rajasthan University 1977 BARC Training School 1977-78 Ph.D (Physics) Kashmir University 1987 Presently: Outstanding Scientist and Head, Indus Synchrotrons Utilization Division, Raja Ramanna Centre or Advanced Technology, Indore and Professor, Homi Bhabha National Institute. Research Interest: X-ray Optics, high aspect ratio micro fabrication, EUV lithography, electron beam lithography, x-ray lithography, thin films, surface and interfaces, synchrotron radiation science and technology. Publications :>200