This talk gives background on how Computational lithography has and continues to be critical for semiconductor scaling. Technical aspects of Computational lithography and some lithography options for future technologies will be covered.
Ramya Viswanathan is a senior engineer in IBM's computational patterning group. She has a masters in Physics from IIT Chennai, and a doctorate in Physics from Rensselaer Polytechnic Institute. She has over 10 years experience in the fields of semiconductor process modeling and computational lithography, and has several publications and patents in the field.