This talk will describe the innovations and theory behind a powerful suite of MEMS technologies used worldwide for electrical characterization of electronic materials. How could micro four-point probes become the industry standard for electrical measurements on ultrathin semiconductors used in CMOS fabrication? How can you do Hall effect measurements more accurately than with a standard Hall bar? And what do we learn about the electrical properties of graphene when we compare THz spectroscopy to micro four-point probes – 1D transport in a 2D conductor?
Dirch Hjorth Petersen is a Senior Researcher at the Technical University of Denmark. He received his PhD degree in Applied Physics from the Technical University of Denmark in 2010, where it was awarded PhD of the year. For 13 years, he has worked in both research and industry with development of electrical characterization techniques for ultra-thin materials. His research has resulted in >50 journal articles within micro- and nanotechnology; and several of his patents are used in advanced metrology systems deployed at most of the world’s leading semiconductor fabs.