Industry Session 3 |
| Panel: Nanofabrication |
| Time: 4.30 to 6.00pm |
| Description |
| Who is Raith? |
With more than 25 years of experience and the largest user base in electron beam lithography solutions, Raith is a key instrument makers in this field. The talk will introduce the company and related user infrastructure. |
What should you know about … nanofabrication? |
This talk will describe the general principles and technologies, which are used for Nanofabrication today. Specifically it will cover e-beam patterning and related processes. Resistless lithography by ion or electron beam radiation will be discussed and compared with the conventional patterning in resists. A general overview over the available instrument classes will be given. |
Raith tools for nanofabrication - an overview |
Raith instruments do match the needs of a large user base. The talk will shortly describe the typical benefits and applications of Raith instruments and their performance data. |
| Speakers: |
Martin Kirchner
Raith GmbH
Dirk Brüggemann
Raith GmbH
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