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MEMS Proto Fab

MEMS Proto Fab

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  • Our team
  • Facilities
  • Capabilities
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Gallery

  • Visitor corridor
  • Wire bonder
  • Photo-lithography bay seen from visitor corridor
  • Photo-lithography bay
  • Furnaces for thin film deposition
  • Multi target sputter tool
  • Wet benches
  • Etching bay
  • Facilities and utilities area
  • Wire bonder
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