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In the area of physics and technology, focus of the work has largely
been on the study of degradation of MOS devices, and the development
of new materials and processes for ameliorating their effects. The
degradation effects studied include radiation effects, hot-carrier
effects, high-field stressing, oxide breakdown, ESD, and NBTI. We
have developed a rad-hard MOS technology going upto 1 Mrad(Si) for
ionizing and neutron radiations. This technology was initially
developed using MOS capacitors as the vehicle, but finally proved
with MOS gate-array based circuits fabricated in our laboratory.
We have extensively studied new types of oxides,
especially oxynitrides and nitrides, in the range of 2-300 nm. This
includes a study of growth kinetics, and optimization of growth
conditions, as well as detailed characterization of defects in these
oxides and
mechanisms of defect generation under radiation, hot-carrier
stressing, and high-field stressing. We have also looked in detail
at breakdown characteristics of gate oxides, including various
aspects of time dependent dielectric breakdown. Recent interests
include the time dependent dielectric breakdown, study of high-k
insulators for gate dielectrics, NBTI studies in oxynitrides etc. |
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