In the area of sensors, we have fabricated several types of MOS-based sensors, including gas sensors, ion sensors, biosensors, and radiation sensors. Electron-beam evaporated ITO has been used as a sensor for reducing gases like hydrogen. IIT Bombay is the first institution in India to have fabricated and tested ion-sensitive field-effect transistors (ISFETs). This has included an in-depth study of the behaviour of electrolyte-oxide interface which determines the ISFET response. The group also reported for the first time Electrolyte-Insulator-Semiconductor (EIS) based sensors for CK-MB detection. Sensors for IR and visible light have also been studied. This includes indium-doped silicon for infrared and highly conducting cadmium oxide for transparent front electrodes for photocells. In the area of biosensors, novel conducting polymer-based biosensors have been fabricated and tested in collaboration with the Departments of Chemistry and Materials Science at IIT Bombay. A MOS-based total dose sensor for high-energy radiation has also been designed and fabricated for use in medical therapy applications. Recently, work has been initiated on micro machined chemical and physical sensing systems. A semiconductor based point of care/diagnosis system for myocardial infarction is in an advanced stage of development.