Minimization of the MuGFET Contact Resistance by Integration of NiSi Contacts on Epitaxially Raised Source/Drain Regions”
2005
Grenoble, France
Best paper award at the ESSDERC 2005 held at by A. Dixit, K. G. Anil, R. Rooyackers, F. Leys, M. Kaiser, R. Weemaes, I. Ferain, A. De Keersgieter, N. Collaert, R. Surdeanu, M. Goodwin, P. Zimmerman, R. Loo, M. Caymax, M. Jurczak, S. Biesemans, and K. De Meyer.