Historical Background: Silicon Pressure sensors, Micromachining, MicroElectroMechanical Systems; Microfabrication and Micromachining: Integrated Circuit Processes, Bulk Micromachining: Isotropic Etching and Anisotropic Etching, Wafer Bonding, High Aspect-Ratio Processes (LIGA); Physical Microsensors: Classification of physical sensors, Integrated, Intelligent, or Smart sensors, Sensor Principles, and Examples: Thermal sensors, Electrical Sensors, Mechanical Sensors, Chemical, and Biosensors; Microactuators: Electromagnetic and Thermal micro actuation, Mechanical design of microactuators, Microactuator examples, microvalves, micropumps, micromotors-Microactuator systems: Success Stories, Ink-Jet printer heads, Micro-mirror TV Projector; Surface Micromachining: One or two sacrificial layer processes, Surface micromachining requirements, Polysilicon surface micromachining, Other compatible materials, Silicon Dioxide, Silicon Nitride, Piezoelectric materials, Surface Micromachined Systems: Success Stories, Micromotors, Gear trains, Mechanisms; Application Areas: All-mechanical miniature devices, 3-D electromagnetic actuators, and sensors, RF/Electronics devices, Optical/Photonic devices, Medical devices e.g. DNA-chip, micro-arrays; Lab/Design: (two groups will work on one of the following design projects as a part of the course); RF/Electronics device/system, Optical/Photonic device/system, Medical device e.g. DNA-chip, micro-arrays. Nyquist vs. oversampling converters, Quantization and oversampling, Noise shaping, Noise and signal transfer function (NTF, STF), Linearity (single vs multi-bit quantizer), Second and higher-order Delta-Sigma Modulation, Stability and non-linearity, Maximum stable amplitude, Design of NTF, State-space description of the loop filter, Continuous-time DS modulation, Advantages over discrete time DS, Dynamic-range scaling, Cascade of integrators with feedback LF topology, Effect of clock-jitter, Integrator topologies, Effect of device noise of performance, DS Digital to Analog Converters, Advantages and typical architectures, Decimation and Interpolation filters, Half-band filters, System-level applications of DS modulators.